Wafer-scale solid-state nanopores fabricated using extreme ultraviolet lithography

At this year's IEEE International Electron Devices Meeting (IEDM 2025), imec, a research and innovation hub in advanced semiconductor technologies, presents the first successful wafer-scale fabrication of solid-state nanopores using extreme ultraviolet (EUV) lithography. Solid-state nanopores are emerging as powerful tools for molecular sensing but haven't been commercialized yet. This proof of concept is a crucial step toward their cost-effective (mass) production.